2018Äê9ÔÂ⣬£¬£¬£¬£¬£¬£¬£¬ÓÉÉòÑôÍؾ£¿£¿£¿£¿£¿£¿£¿Æ¼¼ÓÐÏÞ¹«Ë¾×ÔÖ÷ÑÐÖƵÄ12Ó¢´çÔ­×Ó²ã³Á»ý£¨Atomic Layer Deposition£¬£¬£¬£¬£¬£¬£¬£¬ALD£©×°±¸Í¨¹ýÁË¿Í»§µÄÑéÊÕ¡£¡£¡£¡£¡£¡£¡£¡£

        ALD×°±¸ÊǼ¯³Éµç·ÖƱ¸Àú³ÌÖÐÒªº¦µÄ±¡Ä¤³Á»ý×°±¸£¬£¬£¬£¬£¬£¬£¬£¬±»ÊÓΪÏȽø°ëµ¼Ì幤ÒÕÊÖÒÕÉú³¤µÄÒªº¦»·½ÚÖ®Ò»¡£¡£¡£¡£¡£¡£¡£¡£½ñÄê»á¹ÙÍø¹«Ë¾»ùÓÚÒÑͨ¹ýÉú²úÑéÖ¤µÄ¸ß²úÄÜPECVD×°±¸Æ½Ì¨£¬£¬£¬£¬£¬£¬£¬£¬ÀÖ³ÉÑÐÖÆÁ˺£ÄÚÊ×̨Á¿²úÐÍ12Ó¢´çALD×°±¸£¬£¬£¬£¬£¬£¬£¬£¬²¢Ñ¸ËÙÍÆÏòÊг¡£¡£¡£¡£¡£¡£¡£¡£¬£¬£¬£¬£¬£¬£¬£¬¿ÉÓ¦ÓÃÓÚ28nmÒÔÉϼ«´ó¹æÄ£¼¯³Éµç·£¬£¬£¬£¬£¬£¬£¬£¬OLED¼°ÏȽø·â×°£¨TSV£©ÁìÓò£¬£¬£¬£¬£¬£¬£¬£¬Í¶ÈëÏȽøÉú²úÏߣ¬£¬£¬£¬£¬£¬£¬£¬ÓÃÓÚ³Á»ýSiO2£¬£¬£¬£¬£¬£¬£¬£¬SiNxµÈ¾øÔµ±¡Ä¤¡£¡£¡£¡£¡£¡£¡£¡£¸Ã×°±¸ÒÑÀֳɽøÈëÊÔÉú²úÏßÉóºËÑéÖ¤£¬£¬£¬£¬£¬£¬£¬£¬Àúʱ3¸ö¶àÔ£¬£¬£¬£¬£¬£¬£¬£¬Í¨¹ýÁË¿Í»§µÄÉóºËÑéÊÕ£¬£¬£¬£¬£¬£¬£¬£¬×°±¸¸÷ÏîÐÔÄÜÖ¸±ê¾ùÖª×ãÒªÇ󣬣¬£¬£¬£¬£¬£¬£¬ÇÒµÖ´ï»òÁè¼ÝÁ˹ú¼ÊͬÀà²úÆ·µÄÏȽøˮƽ£¬£¬£¬£¬£¬£¬£¬£¬ÕâÊÇÎÒ¹úÔÚʵÏÖ°ëµ¼Ìå×°±¸¹ú²ú»¯Àú³ÌÖеÄÓÖÒ»ÖØ´óÍ»ÆÆ¡£¡£¡£¡£¡£¡£¡£¡£